New beamline for VUV radiometry

Physikalisch-Technische Bundesanstalt increases availability for different measurement tasks at the Metrology Light Source

Design schematic of the VUVR beamline, top right: monochromator grating during adjustment © PTB

A new beamline for radiometry in the vacuum ultraviolet spectral range (VUVR) was successfully commissioned at the Metrology Light Source (MLS). By quickly redirecting the radiation to three different measuring stations, the availability for different measuring tasks is significantly increased.

The new beamline offers dedicated beamline branches for radiometric calibration of radiation receivers, characterisation of optical materials and components (reflectometry), and investigation of complex (imaging) detection systems and spectrometers.

The wavelength range between 40 nm and 200 nm, i.e. the spectral ranges of ultraviolet radiation (UV), "deep" UV and vacuum ultraviolet (VUV), are gaining industrial interest in addition to their importance for basic research, e.g. for increasing the spatial resolution of "classical" optical metrology for the inspection of wafer structures in semiconductor manufacturing and as an "out-of-band" spectral range in EUV lithography. Typical applications in the industrial sector are in material investigations and the characterisation of optical systems. Basic research-oriented measurements are e.g. investigations on photoelectron tomography as well as the characterisation of spectroscopic satellite instrumentation for astrophysics.

Publication:

Journal of Physics: Conference Series
The new PTB beamline for vacuum-ultraviolet radiometry
O. Ogor, U. Kroth, H. Kaser, M. Krzyzagorski and A. Gottwald
DOI 10.1088/1742-6596/2380/1/012032

Contact:

Alexander Gottwald
Physikalisch-Technische Bundesanstalt
Working Group 7.13: UV and VUV Radiometry
alexander.gottwald(at)ptb.de

Press release PTB, 8 November 2023